HaloVac®精密真空泵油是使用Halocarbon PCTFE技术制造的，与使用传统PFPE技术生产的油相比，其化学成分更简单，成本效益更高。 PCTFE化学的内在简单性使其所产生的油在其化学结构中不含任何氧原子。 这使得这些油比路易斯酸PFPE的抗腐蚀能力更强。 此外，在真空泵的常规运行条件下进行的稳定性测试中，已证明HaloVac®油的性能优于PFPE基油。
HaloVac® oils are designed for use as nonflammable and nonreactive lubricants in continuous operations that involve oxidizing environments, or hazardous chemicals. HaloVac® oils are routinely used in applications ranging from plasma etching and chemical vapor deposition in semiconductor fabrication to the vacuums used reactive gas handling and electron microscopy. These oils significantly reduce the safety and exposure risks associated with the routine operation, maintenance, and waste disposal common in these applications.
Key Performance Characteristics:
Chemically inert
Non-toxic
No sludge-formation
Nonflammable (no flash or fire point)
High thermal stability
Exceptional resistance to Lewis-Acids
Low vapor pressure