CHRISTO-LUBE® 含氟润滑剂 - 半导体制造
ECL 工程师的提示和建议
工艺室和晶圆处理
为了避免代价高昂的污染和停工，用于晶圆生产过程操作的润滑剂必须具有广泛的材料相容性、高腐蚀性化学物质环境中出色的稳定性、低力矩、低蒸汽压力（10-12 托，25˚C 时）和极低真空挥发率，以适应 1-10 级洁净室环境要求。
CHRISTO-LUBE® MCG 159
-20 ℃ 至 260 ℃
CHRISTO-LUBE® MCG 109
-65 ℃ 至 250 ℃
CHRISTO-LUBE® MCG 1037N
-50 ℃ 至 260 ℃
CHRISTO-LUBE® MCG 116 is a fully fluorinated grease thickened with PTFE which operates under extreme temperature conditions, has outstanding stability with oxygen and excellent compatibility with metals, plastics and elastomers. This medium consistency fluorinated lubricant is useful in lubricating components found on aircraft and aerospace vehicles where resistance to hydrocarbon fuel and liquid oxygen are important