福州卓凯电子科技有限公司
属于半导体制造设备中的关键结构件，主要用于腔室顶部的屏蔽环组件，起到密封、等离子体防护和工艺稳定性保障的作用。
该部件常见于高精度干法刻蚀（Etching）或化学气相沉积（CVD）设备中，对材料纯度、尺寸精度和耐高温性能有极高要求，以确保制程中颗粒污染小化，并维持稳定的工艺环境。
关键信息汇总：
部件编号：2L05-250034-11
部件名称：RING, SHIELD TOP-HS(PH-TU)V2
制造商：TOKYO ELECTRON TEL
应用设备类型：半导体前道工艺设备（如刻蚀机）
功能角色：腔室顶部屏蔽环，用于等离子体控制与防污染保护
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