这是大福(Daihen)公司生产的一款RF 射频电源(RF Power Generator),具体型号为 RGA-10D-V,常配套用于东京电子(TEL)的半导体制程设备中。
该设备主要用于在等离子体刻蚀或薄膜沉积工艺中提供稳定且的高频电源,是半导体制造产线中的核心组件之一。根据市场流通信息,该型号通常以二手备件或维修服务的形式出现,其状态可能包含“测试正常工作(Working/Tested)”或“作为备件出售(As-Is/Spare)”等不同情况。
核心参数与应用场景
设备功能:作为射频发生器,它为反应腔体内的气体电离提供能量,直接影响工艺的稳定性和良率。
配套体系:该型号常与 TEL 的设备系统(如 3D80-000826-V2/V3 等关联编号)配合使用,属于高度专用的工业备件。
市场现状:由于属于精密工业设备,全新整机较少见,市场上多为翻新机或提供专业维修服务。
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